U. Kaldor

Analysis of the fine structure of Sn$^{11+...14+}$ ions by optical spectroscopy in an electron beam ion trap

A. Windberger [1,2], F. Torretti [1,3], A. Borschevsky [4], A. Ryabtsev [5,6], S. Dobrodey [2], H. Bekker [2], E. Eliav [7], U. Kaldor [7], W. Ubachs [1,3], R. Hoekstra [1,8,2], J. R. Crespo López-Urrutia, O. O. Versolato [1]

Abstract

We experimentally re-evaluate the fine structure of Sn$^{11+...14+}$ ions. These ions are essential in bright extreme-ultraviolet (EUV) plasma-light sources for next-generation nanolithography, but their complex electronic structure is an open challenge for both theory and experiment. We combine optical spectroscopy of magnetic dipole $M1$ transitions, in a wavelength range covering 260\,nm to 780\,nm, with charge-state selective ionization in an electron beam ion trap. Our measurements confirm the predictive power of \emph{ab initio} calculations based on Fock space coupled cluster theory. We validate our line identification using semi-empirical Cowan calculations with adjustable wavefunction parameters. Available Ritz combinations further strengthen our analysis. Comparison with previous work suggests that line identifications in the EUV need to be revisited.